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Introduction to MEMS Spring 2012 Weidong Yi Design, Analysis , Fabrication Course Overview Part 1 Introduction to MEMS Part 2 Microfabrication Fundamentals Part 3 Microsystem Fabrication Processes Part 4 Mechanics, and Transduction Part 5 Electronic Interface Design Principles Part 6 MEMS Design Case Studies Textsbook: 1. Stephen D. Senturia, Microsystem Design, Kluwer Academic Press, 2001 2. Course Reader (Selected Reference Papers) Part 1 Introduction to MEMS What are the Goals of this Course? Accessible to a broad audience àminimal prerequisites Design emphasis àexposure to the techniques useful in analytical design of structures,transducers, and process flows Perspective on MEMS research and commercialization circa Course Mechanics Lectures: Monday, Wednesday 10:00-12:00 Homework: bi-weekly assignments distributed on Thursdays and due the following Thursday at the class beginning Exam: (TBA) Office Hours: (TBA) Credit breakdown (approximate) 10% homework 30% final Project 60% final exam Lecture Outline Today’s Lecture What is MEMS Historical tour of MEMS MEMS and nanotechnology MEMS Defined Micro ElectroMechanical Systems What is MEMS MEMS involve both electronic and non-electronic elements thermal, magnetic, fluidic and optical devices MEMS are “systems” in the true sense Packaging, system partitioning into components, calibration, signal-to-noise ration,stability,reliability MEMS may involve large arrays of microfabricated elements DNA array, infrared imaging devices, both reflective and refractive projection displays Examples of MEMS Devices inkjet-printer cartridges accelerometers Microengines inertial sensors micromirrors, optical scanners fluid pumps, chemical, pressure and flow sensors. Biosensors Dimensional Ranges 1 mm L 300 mm lateral dimensions Surface micromachined structures … “classic MEMS” 300 mm L 3 mm Bulk silicon/wafer bonded structures … still call them MEMS and cover them in this c
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