毕业设计论文-氮化硅涂层的喷涂温度对多晶硅铸锭质量的影响.doc

氮化硅涂层的喷涂温度对多晶硅铸锭质量的影响 摘 要 制备太阳能级多晶硅过程中需要使用坩埚。工业中通常使用的坩埚是石英或石墨坩埚，熔融硅与坩埚接触时不可避免的产生反应粘连，同时坩埚中的杂质也会进入硅熔体中。高浓度的杂质，如C、O、Fe等将使少子寿命显著降低，影响电池性能。通常在坩埚上涂敷涂层使熔体与坩埚壁隔离，来减少反应粘连使铸锭顺利脱模，并阻止坩埚中的杂质在铸造过程中进入硅中。 本文利用多晶硅铸锭过程中喷涂的变化来研究氮化硅涂层对硅锭脱模效果的影响以及通过少子寿命来分析涂层对杂质的隔离效果。影响喷涂效果的主要因素，有效阻止杂质进入硅锭中，又能脱模效果。 ：多晶硅铸锭，喷涂，脱模，杂质少子寿命 The nfluence of Silicon Nitride Coating and Spraying Temperature to The Quality of The Multicrystalline Silicon Ingot ABSTRACT we need to use of crucibles in the process of fabricate solar grade multicrystalline silicon.Typically graphite or quartz crucibles have been used as support of melting silicon.However,in the casting process,there are reaction adhesions on the interface of melting silicon and crucible. Moreover,high density of impurity,such as C,O,Fe,Ca,which plays a crucial role on the degradation of multicrystalline silicon solar cells performance,are usually incorporated through the contact of the melt with the crucible walls.Usually coating has been spayed on the crucible wall as release agent to avoid melting silicon contacting with the crucible wall directly eventually decrease the reaction and impurity diffusion from crucible. This text make use of the spraying temperature to research the effect of the release agent on Si3N4 coating and according to the lifetime to analysis the segregate effect on the coating to impurity in the process of casting multicrystalline silicon. Then comprehensive discussion the main factors on the effect of spraying,and finally make sure a boundary of the spraying to prevent the impurities into the ingot effectively,and achieve to a good release agent face. KEY WORDS: casting multicrystalline silicon，spraying，release agent，lifetime 目 录 1 §1.1太阳能电池的发展 1 §1.2 多晶硅太阳能电池 2 §1.2.1 多晶硅太阳能电池片的加工过程 2 §1.2.2 多晶硅铸锭过程 3 §1.3 铸造多晶硅中主要杂质 3 §1.3.1 硅中氧杂质 3 §1.3.2 硅中碳杂质 4 §1.3.3 硅中氮杂质 5 §1.3.4 硅中金属杂质 6 §1.4 氮化硅的性质和应用 7 §1.5 铸造多晶硅时坩埚涂层目的 8 §1.6 本文研究的主要目的及内容 9 第二章 实验过程 10 §2.1 样品制备 10 §2.1.1 检料 10 §2.1.2 喷涂 10 §2.1.3 坩埚烧结 11 §2.1.4 装料 11 §2.1.5