CH02 2.0 Basic Two Beam Interferometry and Its Applications 光学检测教程文件.pptVIP

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CH02 2.0 Basic Two Beam Interferometry and Its Applications 光学检测教程文件.ppt

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CH02 2.0 Basic Two Beam Interferometry and Its Applications 光学检测教程文件.ppt

2.0 Basic Two Beam Interferometry and Its Applications ;For a source, the disturbance based on the solution of wave equation will be: ;The irradiance is equal to:;;The fringe visibility is defined as:;;;;2.3 Fizeau Interferometer;OPD for 1 fringe space is 1?;;;Considerations for design and measurement: Since the reflectance of the reference flat surface is only 4%, the light reflected off the back side of the transmission flat can not be ignored. To get a better contrast fringe pattern this side should be anti-reflection (AR) coated or the flat is made in the form of a wedge. The effect of aberration in the collimating lens is not uniform. If ? is the maximum angular aberration of the lens, and d is the air-gap thickness, then: ;Source coherence: when using laser source temporal coherence requirement is neglected. The spatial coherence is determined by:;WYKO-6000 Figure Interferometer;Optical Layout of Zygo Mark Interferometer;2.4 Twyman-Green Interferometer;Testing Spherical Surfaces;Considerations for design and measurement: Two interference arms have OPD compensating effect. According to : ;For beam splitter, face A is half reflection and half transmission coated, while face B should not reflect any light back into the CCD, this is implemented by using multilayer antireflection coating or wedge. For diverging lens, should be of good quality. For collimating lens, similar requirement to Fizeau.;2.5 Mach-Zehnder Interferometer;Features: Reference arm and test arm are separated, suitable for measuring transparent samples, lenses and etc. Equal-Thickness fringes. Similar design consideration to Fizeau. Relatively easier for calibration, systematic errors are determined by the testing result without samples in the test arm. ;;;;;2.7 Shear Interferometer;Common path, insensitive to environment. Indirect result, measures wavefront slope. To get complete information need to analyze two interferograms at orthogonal directions of shear. Can not evaluate the entire p