考虑漏电容的平板式微执行器pull-flat panel microactuator pul considering leakage capacitance.docxVIP

摘要基于 MEMS（微机电系统）技术的微传感器、微执行器得到了快速发展，在其各种驱 动方式中，静电驱动占有重要地位。Pull-in 现象是静电驱动的微执行器的一个重要现象， 已经引起了广泛的重视和研究。Pull-in 现象有利有弊，只要确定了 Pull-in 点的位置就可以 灵活运用。所以，不管是在理论研究，还是在实际应用方面，获得精确的 Pull-in 点的相关 数据都是非常必要的。在本文中，概述了微机电系统的发展现状和发展趋势，介绍了微机电系统的制作工艺 和国内外关于微执行器的研究现状，以及简单阐述了微执行器的 Pull-in 现象和机理。通过 分析在忽略边缘电场效应的情况下的平行板微执行器的 Pull-in 现象，详细分析了平行板微 执行器的 Pull-in 现象，得出相关的数据。并且介绍了平行板微执行器的边缘电场效应，分 析了边缘电场效应产生的机理，通过理论分析，详细研究了平行板电容器的边缘电场效应。本文分析了考虑边缘电场效应的三种理论模型，重点研究了在考虑边缘电场效应的情 况下的平行板微执行器的静态 Pull-in 现象，通过平行板微执行器的理论模型，得出了 Pull-in 现象的相关数据。通过实例分析，分别考察了平行板微执行器的各项参数的变化对于 Pull-in 电压和 Pull-in 点的影响。最后用有限元分析软件 ANSYS 建模，通过数据的对比，说明理 论模型的精确度和适用范围。关键词：微机电系统，平行板微执行器，静态 Pull-in 现象，边缘电场效应，有限元分析IAbstractBased on the MEMS(micro-electro-mechanical system) technology,the micro-sensor and the mems actuators are growing rapidly.In its various drive manners, the electrostatic drive occupies an important position.Pull - in phenomenon is an important feature in the micro actuators driven by electrostatic,which has aroused wide attention and research. There are both advantages and disadvantages in Pull - in phenomenon ,but people can control it just confirm the accurate pull - in position. Therefore, whether in the theoretical research, or in practical applications, it is very necessary to obtain precise datas related to pull - in position.This paper describes the development situation and development trend of the micro-electro-mechanical system, and introduces the manufacturing process of the micro-electro-mechanical system and situation of study about micro actuators ,both at home and abroad . And simply introduces the pull- in phenomenon of micro actuators and its mechanism .Through analyses the pull- in phenomenon of parallel plate micro actuators under the situation of ignore edge field effect, making a detailed analysis on the parallel plate micro actuators and gets the relevant datas.Besides,the paper also introduces the edge field effect of parallel plate micro actuators , and analyses the emergence mechanism