Wet Bulk icromachining湿体微加工.pptVIP

Anisotropic Etching of (110)-Si Cavity defined by: {111} walls slow-etching planes; {110} floor fastest-etching plane; {100} bottom side walls fast-etching planes; Final shape of cavity depends on: Mask geometry; Etching time. Cavity shape: Rhombic prisms; Hexahedric prisms. Cavity Geometry for (110)-Si Outline 1. Background and Motivation 2. The Silicon Crystal 3. Isotropic Wet Etching 4. Anisotropic Wet Etching 5. Selective Etching 6. Convex Corners Methods for Selective Etching Time etching methods: Calculate the needed etching time on the basis of the etching rate. Easy, but inaccurate me