Fabrication of Solar Cells - Powering Silicon Valley San Jose 制造太阳能电池供电的圣若泽-硅谷.pptVIP

EE198B Senior Project class Fall 2001 San Jose State University Single Crystal Solar Photocell Team Members: Mack Appleton Sung Min Park Yemane Tsegaye Angel Milano Project Advisor: Dr. David Parent Project Outline Introduction Initial Testing Design and Simulation. Fabrication of Solar Cells Test Solar Cells Conclusion Project Objective To design, simulate, establish and document a silicon process base-line traveler for the Single Crystal Solar Photocell. To enhance the relative efficiency of the Solar Photocells by 5%. Design and Simulation Maximize the efficiency Anti-refraction coating. Formula Equations 1. Rs=?L/w (2D) 2. Rs = (Rn+) + (Rbar) + (Rcontact) Rn+ = (?n+ * S)/(n*b) Rbar = (?al*b)/(Wb*n) Rcontact = ?c/(Wb*b) 3. ? = Pm/Pin = (FF*IL*Voc)/Pin 4. FF : Fill Factor (Im*Vm)/(Isc*Voc) 5. P=I*V= (I^2)*R Design of Models ? Large-grid with AR ? Large-grid without AR ? Small-grid with AR ? Small-grid without AR where Large grid : S=3.3 cm, Wb=0.2cm, b=6.6cm, and 2 fingers. Small grid : S=0.75cm, Wb=0.2cm, b=6cm, and 8 fingers Fabrication of Solar Cells Diffuse donor region Apply aluminum coating to front of wafer Photolithography to define solar cell pattern Etch aluminum to create solar cell pattern Apply anti-reflection coating * Apply aluminum coating to back of wafer Anneal wafers Remove outer edges of wafers Diffuse Donor Region Spin on phosphorous doped silica glass Apply 3ml to front of wafer Spin @ 3000 rpm for 20 seconds Diffuse in furnace Heat furnace to 1100oc Push in wafers ? inch per 15 seconds Diffuse for 1 hour Pull out wafers ? inch per 15 seconds Makes wafer into a large diode Apply Aluminum Coating Desire 2 microns thickness Sputter on the aluminum Accurate and precise Fast (2 microns onto 8 wafers in 15 min.) Prone to breaking down - Or - Evaporate on aluminum Reliable Slow (2 microns onto 24 wafers in 3 to 4 hours) Not very precise Photolithography Apply 3ml photo-resist; Spin for 20s @ 5000 rpm Soft