一种精密电容测量薄膜平面扩张的第三部分导体与半导体材料 圆弧型柔性铰链刚度特性分析 柔性铰链 相关外文翻译.docVIP

外 文 翻 译 毕业设计题目：柔性铰链微运动的测量与控制方法 原文1：A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion–Part III: Conducting and Semiconducting Materials 译文1：一种精密电容测量薄膜平面扩张的第三部分：导体和半导体材料 原文2：Circular are flexible hinge stiffness character analysis 译文2：圆弧型柔性铰链刚度特性分析 A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion–Part III: Conducting and Semiconducting Materials Abstract—This paper describes the construction, calibration, and use of a precision capacitance-based metrology for the measurement of the thermal and hygrothermal (swelling) expansion of thin films. It is demonstrated that with this version of our capacitance cell, materials ranging in electrical properties from insulators to conductors can be measured. The results of our measurements on p-type100 -oriented single crystal silicon are compared to the recommended standard reference values from the literature and are shown to be in excellent agreement. Index Terms—Capacitance cell, coefficient of thermal expansion (CTE), guarded electrode, high sensitivity displacement, inner layer dielectrics, polymers, thin films. I. INTRODUCTION THE coefficient of thermal expansion (CTE) is a key design parameter in many applications. It is used for estimating dimensional tolerances and thermal stress mismatches. The latter is of great importance to the electronics industry, where thermal stresses can lead to device failure. For accurate modeling of these systems, reliable values are needed for the CTE. Traditionally, displacement gauge techniques such as thermomechanical analysis (TMA) have been utilized for determining the CTE. However, standard test methods based on these techniques are limited to dimensions greater than 100 m [1-2]. This is problematic for materials which can be formed only as thin layers (such as coatings and certain inner layer dielectrics). Additionally, there is some question as to whether values obtained on larger samples (bulk material) are the same as