不同制备工艺的fe-ga薄膜的微结构和磁性能研究-microstructure and magnetic properties of fe - ga thin films prepared by different processes.docxVIP

The micro-structure and magnetic properties of Fe-Ga thin films with different preparationAbstractThis paper present a study of the growth and magnetic properties of Fe-Ga thin films deposited on Si(100) substrates and by the dc magnetron sputtering method with various deposition parameters. The structure and magnetic properties of Fe-Ga thin films have been investigated by using X-ray diffraction analysis (XRD)， scanning electron microscope (SE礼)， physical property measurement system (PP礼S). The influences of the deposition parameters such as sputtering power， substrates temperature and sput