微纳检测技术 微梁与其应用.pptVIP

Ⅲ The Microcantilever: 微悬臂梁 An Enabling Element for MEMS Nanotechnology 纳米技术 Ⅳ Introduction to MEMS Microsensors 微型传感器MEMS的介绍 *  Ⅲ The Microcantilever:  An Enabling Element for MEMS Nanotechnology 1 Microcantilever in MEMS and Nanotechnology 2 Introduction to Microcantilevers 3 Impressive impressive microcantilever application examples * 1 MEMS and nanotechnology MEMS (MST: Micro-System Technology) Short for micro-electromechanical systems, the name for technology that embeds mechanical devices such as fluid sensors, mirrors, actuators, pressure and temperature sensors, vibration sensors and valves in semiconductor chips. 短的微机电系统中，嵌入技术的名称，如液体传感器，反射镜，激励器，压力和温度传感器，振动传感器和半导体芯片的机械设备阀门MEMS combine many disciplines, including physics, bioinformatics, biochemistry, electrical engineering, optics and electronics. 物理，生物信息学，生物化学，电气工程，光学和电子 Nanotechnology Nanotechnology is the projected ability to make things from the bottom up, using techniques and tools that are being developed today to place every atom and molecule in a desired place. If this form of molecular engineering is achieved, which seems probable, it will result in a manufacturing revolution. It also has serious economic, social, environmental, and military implications. * Sensors and actuators are the fundamental and most important elements for MEMS and nanotechnology progress. The microcantilever provides us a unique tool for sensing ultra-small forces in the microscopical world. Microcantilevers are used as springs in microworld. The most impressive of microcantielver? * 2 Introduction to microcantilevers * Tip Parameters Full tip cone angle ????? 30° Tip height 20 ~ 25 μm Typical tip radius 10.0 nm Materials length (μm) width (μm) Thickness (μm) Spring constant (N/m) Resonant frequency (kHz) Si, Si3N4 polymer tens~hundreds tens 0.7~several 0.001~hundreds 3