微系统技术（北理内部讲义）讲解ppt课件.pptVIP

MEMS 绪论;*;*;1.1、What Is MICROSYSTEMS;The status of micro-system technology;;*;*;The Relationship Between Micro-systems And The IC Manufacturing;*;*;*;*;*;*;1.2 Micro-system Technology Based;*;RF Wireless Technology;RF / Wireless Applications;*;Optical Technology;The Potential Of Optical Technology Developing;MicroElectroMechanical Systems;This Subject is Called;;History;History, Cont.;What are MEMS?;Precision Engineered Gears are shown here to be fabricated by a deep X-ray lithography and electrodeposition process. Each gear is 100 microns tall, made of nickel, and are held to submicron dimen