CT扩散炉培训教材设备中英文版.pptx

centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace ;Centrotherm扩散炉的组成;设备 平面结构Equipment plane structure ;Loading box上料箱 ;Loading box上料箱 ;Loading box 上料箱;TGA有毒气体排放;Heating furnace炉膛;Gas cabinet气源柜;Cooling water inlet and water system冷却水系统;Thermostatic bath恒温槽;Silicon carbide paddle碳化硅桨;Range detection alarm范围检测报警器; Communication Network Overview通信网络总览;Heating system加热系统;Cooling system冷却系统;Alarm lamp information;Operation panel操作面板;Operation panel操作面板;Operation panel操作面板;CMI interface CMI桌面信息;CMI interface CMI桌面信息;The CMI user interfaceCMI使用者桌面;简单介绍