描述掠入射角观测薄膜样品结构的基本原理和方法根据X射线.pptVIP

材料物理专业实验于金库 实验一、真空蒸发法制备碳膜 实验目的 实验原理及方法 真空蒸发镀膜法(简称真空蒸镀)是在真空室中，加热蒸发容器中待形成薄膜的原材料，使其原 子或分子从表面气化逸出，形成蒸气流，入射到固体(称为衬底或基片)表面，凝结形成固态薄膜的 方法。由于真空蒸发法成真空蒸镀法主要物理过程是通过加热蒸发材料而产生，所以又称热蒸发法 。采用这种方法制造薄膜，用途十分广泛。近年来，该法的改进主要是在蒸发源上。为了抑制或避 免薄膜原材料与蒸发加热器发生化学反应，改用耐热陶瓷坩锅。为了蒸发低蒸气压物质，采用电子 束加热源或激光加热源。为了制造成分复杂或多层复合薄膜，发展了多源共蒸发或顺序蒸发法。为 了制备化合物薄膜或抑制薄膜成分对原材料的偏离，出现了反应蒸发法等。 一般说来，真空蒸发(除电子束蒸发外)与化学气相沉积、溅射镀膜等成膜方法相比较，有如下 特点：设备比较简单、操作容易；制成的薄膜纯度高、质量好，厚度可较准确控制，成膜速率快、 效率高，用掩模可以获得清晰图形；薄膜的生长机理比较单纯。这种方法的主要缺点是，不容易获 得结晶结构的薄膜，所形成薄膜在基板上的附着力较小，工艺重复性不够好等。 实验步骤 实验二、X射线掠入射角分析薄膜结构 实验目的 实验仪器 基本原理 实验报告要求 1.描述掠入射角观测薄膜样品结构的基本原理和 方法； 2.根据X射线衍射结果确定样品的物相、晶系及 晶面指数。 实验原理及方法 实验仪器及材料 实验步骤 分析整理实验数据，写出实验报告 实验四 纳米压痕实验 实验目的 实验原理 The X’Celerator is the world’s fastest X-ray detector. The data collection can be carried out much faster, because of the use of RTMS (Real Time Multiple Strip) detection technology. It is like having over 100 parallel detectors in the diffractometer, instead of just one. As a result of this, an increase in speed of datacollection with a factor of up to 100 is routinely achieved. Unlike competitor’s ‘fast’ detection systems, this increase in speed of data collection is not accompanied with a decrease in resolution. Even better, when a high speed of data collection is not required, a scan with a superior data quality can be obtained in the same time. The detection system is mounted on a PreFIX module and can easily be exchanged for other PreFIX modules when other types of experiments are to be performed. There is no need for laborious re-alignment procedures. The use of RTMS detection technology allows for a simple module that does not require any additional calibration or maintenance. The X’Celerator is the world’s fastest X-ray detector. The data collection can be carried out much faster, because of the use of RTMS (Real Time Multiple Strip) detection technology. It is like having over 100 parallel detectors in the diffractometer, instead of just one. As a result of this, an inc