面向未来的表格面精饰新技术超临界流体技术.docVIP

面向未来的表面精饰新技术──超临界流体技术 方景礼 （南京大学化学系） 摘要：超临界流体技术是近年发展起来的高新技术。在超临界状态下，普通的二氧化碳和水变成了超临界流体，它具有许多奇特的物理化学性质，已在许多工业领域获得广泛的应用。本文详细评述了超临界流体技术的原理、特点以及在表面精饰领域的各个方面的应用和进展，重点介绍了超临界CO2萃取与提纯技术，超临界电沉积和化学沉积技术，超临界水氧化技术等。文中阐述了超临界CO2清洗硅晶圆，纯化电镀和化工中间体，制备纳米微粒和复合镀层，沉积纳米化学镀、电镀、电铸及其复合镀层，同时还介绍了超临界水氧化技术在处理各种难降解有机废水、工业污泥、废旧印刷电路板等方面的应用。最后还介绍了超临界流体处理设备上的进展。事实说明，超临界流体技术在表面精饰行业有广阔的应用前景，是古老的表面精饰行业向技术更先进，工艺更环保，镀层质量更优越方向迈进的新途径。 关键词：超临界流体；表面精饰；超临界二氧化碳清洗；超临界电镀；超临界化学镀;超临界纳米粒子复合镀；超临界水氧化；超临界水处理电镀废物和废水 New Surface Finishing Technology for the future—Supercritical fluid Technology // FANG Jing-li Abstract: Supercritical fluid technology is a new technology developed in the recent years. In the supercritical state, ordinary carbon dioxide and water become supercritical fluid, which has many unique physical and chemical properties. It has been widely used in many industrial fields. This paper reviews the principles of the supercritical fluid technology, its characteristics, its application and progress in various aspects of surface finishing. The emphasis is put on supercritical CO2 extraction and purification technology, supercritical electrical deposition and chemical deposition technology, and supercritical water oxidation technology. This paper describes the use of supercritical CO2 in cleaning silicon wafers, purifying plating intermediates, preparing nanoparticle composite coatings, and deposition of chemical nano-plating, electroplating, electroforming and composite coatings. It also describes the application of supercritical water oxidation technology in the treatment of various refractory organic waste water, industrial sludge and waste printed circuit boards. Finally, it is also described in the paper the progress of the supercritical fluid processing device. The facts show that supercritical fluid technology has broad application prospects in surface finishing. It is a new way to make the old-fashioned surface finishing industry more advanced in technology, more environmentally friendly in process an