基于聚偏氟乙烯（PVDF）薄膜新型SPM测头.PDF

2009 年第 43 卷 №5 95 基于聚偏氟乙烯( PVDF) 薄膜的新型 SPM 测头 结构及性能研究 侯茂盛 　黄强先 　杨朋桢 合肥工业大学 摘 　要 :为了对柔软易损坏材料以及具有大台阶特征的表面实现高精度非破坏性测量 ,研制了一种采用 PVDF ( ) 薄膜和压电驱动器 PZTactuator 结合钨探针构成的新型 SPM 测头 。介绍了测头的构成和工作原理 ,并通过一系列 ( ) 相关实验 ,确定了测头的相关参数和性能 如薄膜的尺寸参数 、所构成振动梁的品质因素及弹性常数等 ,初步证实 了该测头可以满足上述测量要求 。 关键词 :PVDF 薄膜 , 　振动梁 , 　测头性能 , 　扫描探针显微镜 Study on the Structure and Performance of a Ne w SPM Stylus Fabricated by PVDF Film Hou Maosheng 　Huang Qiangxian 　Yang Pengzhen Abstract : In order to measure the topography of the soft , easilydestroyed samples as well as that with high step microfea tures accurately and nondestructively , a new style of SPM stylus fabricated by PVDF film and PZTactuators has been developed. The mechanical structure and operating principle of the stylus are introduced firstly , and then , according to a series of experi ments , the physical dimensions of the PVDF film and performance of the stylus , such as the Q - factor , spring constant k , are confirmed. These results preliminary proved that this style of stylus can basically meet the challenges mentioned above . Keywords :PVDF film , 　vibrating beam , 　stylus performance , 　SPM ( ) AFM 的轻敲模式 Tapping Mode ,所以对试样表面的 　　1 　引言 测量力很小 ,适合于测量一些柔软表面 ,如蛋白质 、 20 世纪 80 年代初 , IBM 公司苏黎世实验室的 微细器件等 。同时这种 TM 工作状态 ,使探针对试 G. Binin