基于干涉法的量块长度测量技术研究-光学工程专业论文.docxVIP

苎主篓黑————————————堂曼塑堑盟曼堡堡壁篓里塾查竺塞一 苎主篓黑————————————堂曼塑堑盟曼堡堡壁篓里塾查竺塞 一 ore 8uccessful in solving the same engineering problem with different meth。ds． The equipment reaches a high degree of digitization，in々ellece豫Iiz8ti∞∞d integration-The algorithms are optimized． And the program executes very quickly and achieves high preci sion，up to k／50 for the phase shifting Interfero摊etr孔The equipment reaches the稍v考nced level of the simJ 18r ones in the world． Key Words：Gauge block，IntJ．*ffvrometer，Optical intcrferomctric measurement,Ima口e processJng,Fringe analysis method，Fast Fourier Transform method．Phase—