硅基微环谐振器中四波混频效应的理论与实验研究-物理电子学专业论文.docxVIP

华中科技大学硕士学位论文 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract Nonlinear optical effects such as four wave mixing (FWM) and parametric gain have been widely explored to realize all-optical communication in fibers. However, due to its low nonlinear Kerr coefficient and small refractive index contrast, several kilometers fiber is required to realize FWM effect, which restricts its application in chipscale photonic circuit. On the other hand, silicon nano-waveguide have larger nonlinear coefficient, small effective area of nonlinear interaction and high compatibility with CMOS technology, making it an ideal candidate for a variety of nonlinear effects. In addition, by combining the high transverse optical confinement with resonant enhancement from a microring resonator, the nonlinear effect with high efficiency can be achieved. Because of the unique nonlinear effects in silicon, a detailed theoretical analyse of nonlinear optical effect, especially FWM effect, is carried out. The microring resonator is simulated and optimized in order to achieve good results. The microring resonator with Q-value of 60000 and extinction ratio of 6 dB is fabricated by using the E-Beam Lithograthy and ICP etching, and characterized by photonic device test system. The maxium conversion efficiency of -25 dB is obtained at low pump power around 10 mW. A hybrid silicon waveguide structure is proposed to stronger nonlinear effects. In this dissertation, the low-power, high efficiency FWM effect is demonstrated in our silicon microring resonator, which indicates potential on-chip applications such as signal processing, quantum computing and single-photon source. Key words: Silicon Photonics Four Wave Mixing Microring Resonator Hybrid Integration PAGE IV PAGE IV 目 录 摘 要 I HYPERLINK \l _bookmark0 Abstract II HYPERLINK \l _bookmark1 1 绪论 HYPERLINK \l _bookmark2 1.1 本课题研究的背景与意义 (1) HYPERLINK \l _bookmark3 1.2 本课题研究的现状 (2) HYPERLINK \l _bookmark4 1.3 本文主要研究内容 (3) HYPERLINK \l _bookmark5 2 四波混频的理论分析