微细电火花线切割加工装置及应用-中国科技论文在线.PDF

中国科技论文在线 38 6 Vol38 No6 2 0 0 6 6 JOURNAL OFHARBIN INSTITUTE OF TECHNOLOGY Jun. 2006 狄士春, 黄瑞宁, 迟关心, 赵万生 (, 150001) : 开发了一套微细电火花线切割加工装置. 主要由精确可控微小放电能量的脉冲电 加工状态在线 检测与控制系统基于压电陶瓷驱动的精密伺服控制系统和恒张力走丝系统等关键技术构成. 利用直径为 30 m 的微细电极丝, 加工出微小槽的最小宽度< 38 m, 表明放电间隙 4 m, 并且白层厚度 < 2 m, 表面 粗糙度R a 01 m. 给出了微小齿轮以及各种各样的异型孔加工实例, 证实该设备具有较广泛的实用性. : 微细电火花线切割; 脉冲电 ; 微小零件; 关键技术 : TG661 : A : 0367- 6234( 2006)05- 0865- 0 MW EDM equipm ent and its app lication DIShichun, HUANG Ruining, CHIGuanxin, ZHAO Wansheng (Dept. ofM echanicalEngineering, Harbin InstituteofTechnology, Harbin 150001, China) Abstract: A new equipmentofmicrowire electricaldischargemachining (MWEDM) wasdeveloped. Thekey technology ofMWEDM mainly includesm icro energy pulse generatorwith precise controlled, gap discharge states detection and controlled system, precise servo control system based on piezoelectric ceramicsmotors driven, constant tensionwinding system. The experimentalresearch onMWEDM techniques show thatutilizing microw ire electrodewith diameter in 30 m, MWEDM can machinemicro slotwithm inimum size of 38 m wide, and the surface roughness (Ra) is smaller than 01m, thewhite layer is nomore than 2 m. M icro slo,t micro shaped holes andm icro gearon stainless steel can be easymachined. K ey w ords: MWEDM; pulse generator; micro par;t key technology ! ∀ . , , , [3- 4] (MEMS) . , [ 1- 2] . . , , , , , , .