激光切割电容式Z浮微小电容检测系统的研究-光学工程专业论文.docxVIP

华中科技大学硕士学位论文 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract The laser cutting capacitive Z floating tracking focus device is used for real-time detect surface height of unit in the laser cutting process, then the cutting head can make appropriate adjustments according to the undulating surface of unit to ensure the focus is always in ideal location and maintain the defocus constant in cutting process, so as to control the incision shape to improve the roughness of cut surface. At present, foreign countries have developed a laser cutting head with auto-focus system, however the price is expensive.So i