翻译mems相关文微机械振动谐振器的规模集成极其振荡器实现.docVIP

微机械振动谐振器的规模集成极其振荡器实现[0] 英文摘要：micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Q’s10,000 at 1.5 GHz are described as an attractive solution to the increasing count of RF components (e.g., filters) expected to be needed by future multi-band, multimode wireless devices. Indeed, as vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circu