毕业论文-半导体气体传感器测试系统设计.docVIP

PAGE \* MERGEFORMAT PAGE \* MERGEFORMAT 1 摘要 鉴于目前实验室的气敏测试系统的精度差，危险系数高以及操作复杂等诸多不利因素，本文从测试软件，测试电路以及测试腔三个部分进行了设计和改进使得本测试系统更加使用于实验室的常用气敏传感器的测试。 测试所用的软件使用的是C#语言和SCPI指令进行编写的，C#主要是用来进行界面的编写以及后台的数据处理，SCPI指令则是用来进行与测试仪器进行通信的。编写的软件具有恒定电压多次测量，扫描电压测量以及分阶段测量三种功能，可以将测试所得的数据以文本和折线图两种方式显示给用户。测试腔根据实验室常用测量方式和所用气体针对性地进行设计，测试腔主要是用来提供测试环境和载具的，故在设计的过程中使用的是耐腐蚀性和耐高温的材料，此外在设计的过程中注意了气密性的设计，方便于后期的抽真空。在进行电路设计的过程中，对布线进行了优化，腔内部电路与外部测量电路使用航空插头进行连接，这样可以减少开孔数以增强气密性。内部的测试台是使用聚四氟乙烯所制作的，可以耐高温耐腐蚀，且在内部固定了两个测试台以实现多工位测量的需求。 整套软件已设计和编写完成，经测试前期设计的三个测量功能以及多个附属功能均能正常运行。并测量了部分样品，与之前的系统比较有着显著的优点。测试腔已设计完成，并与制作方沟通完成。整个系统基本能实现预期功能，可能会有着些许的缺点，这便需要在使用的过程中逐步完善。 关键词：程控测量 SCPI 气敏测试 气体传感器 Abstract In view of the present gas sensitive laboratory test system accuracy, high risk and complicated operation and many other negative factors, this article from the test software, three parts of the test circuit and the test chamber has been designed and improved the test system used for gas sensor testing is more used in laboratory. The test software is written, C# language and SCPI instructions.C# is mainly used to prepare and handle background data interface, the SCPI command is used to communicate with the test instrument. The software can have constant voltage multiple measurements, scanning voltage measurement and the three functional stage measurement, the test data in text and line graph two ways to display to the user. The test chamber according to the common measurement methods of laboratory and gas used to design, test chamber is mainly used to provide the test environment and the carrier, so in the design process is the corrosion resistance and high temperature resistant materials, and design in the process of attention to design the tightness of vacuum, convenient in the late. In the process of circuit design, the wiring is optimized, cavity internal circuit and external circuit connect with the aviation plug, thus reducing the opening of enhancing air tightness. Test table is the use of PTFE production, can be