基于原子力显微镜的纳米梁杨氏模量的测量-天津大学学报.pdfVIP

  • 43
  • 0
  • 约1.54千字
  • 约 5页
  • 2019-07-06 发布于天津
  • 举报

基于原子力显微镜的纳米梁杨氏模量的测量-天津大学学报.pdf

No.7NanobeammethodmeasurementmodulusmeasurementmodulusmodulusmodelmeasurementV01.40ModulusAFMmethodmodulusMeasurementPrecisionBasedareaYu—bobasedbroadusedonononnanobeamresults.Theresult7xuandatomicofoftesttestSandnanobeamonofofofofofofofofofofofteststructureforforceforforforceforceforcecorrectionofofthethethethethicknessevaluationthethethethissolvedsiliconinisintroduced.Threeissuesinfluenceload AFMAFMmicrocmitilever’468.78allrvenanobeamnanobeam625.04SiSensitiveSiofofof312.52tinl.Schematicforcecalibration!56.26·818· methodVVXForceForceTab.1468.78468.784OOCalculationnm.resultsO.9lO.9lO.92nanobeam625.04625.040Si96.11954.894.02980.595.95962.20.5ofof0.50.350.69312.52312.522.522287.322.O2203.362.52deflectiondeflection36.9535thetest72.58l156.26156.26188.54182.011152.8198.30184.101.0199.66185.101.5193.29179.20196.32”7·819· NEMSAAFM.MEMSMaartenMechanicalMachineWMasterMicroelectromechani-modulusmeasurementsmechanicalmaterialmaterialmicroelectromeehanicalmodulusmassmeasuremeasurementmeasurementHuUni-BrianBoerVeecoDe—PrecisionKbasedPeter--5nanostructuresasaElectronTestEducation46.95%4on-5.69%-6.97%relativenon-destructiveL.9O.95%ntLrlO·cantileversnanoscale062a1.Pres.anda1.Researchanda1.Nanoelectrome·andScienceandSamuelandandConferenceofofofofofofofofofof34.44%34errorsenttotesttest25.37%SchematicSchematicandactuatedSPM一12.48%forforfilmsfor3causedchanicalcaldevicesandthethe7.84%thethe799.Santriibo—ofofofMaterialscharacterizationIIIIIIIthethesituationsissiliconsiliconIEEEInstrumentsInstructionloadloadloadidealininital■7■·820·

文档评论(0)

1亿VIP精品文档

相关文档