基于扫描电子显微镜的磁头极尖尺寸测量工艺研究-机械工程专业论文.docxVIP

Classified Index: T G115.2 U.D.C: 621.3 Dissertation for the Master Degree of Engineering RESEARCH ON POLE TIP MEASUREMENT METHOD OF MAGNETIC HEAD BASED ON SEM Candidate: He Ping Supervisor: Associate Prof. Liu Shoubin Associate Supervisor: Dr. Yan Ge Academic Degree Applied for: Master of Engineering Specialty: Mechanical Engineering Affiliation: SAE Magnetics (H.K.) Ltd. Date of Defence: December, 2008 Degree-Conferring-Institution: Harbin Institute of Technology I I 摘要 随着数据存储技术的发展要求，磁头的尺寸越来越小，目前已经达到纳 米尺度。影响磁头磁学性能的主要因素是其材料的成分和尺寸，尤其是磁头 极尖几何尺寸更为重要。极尖几何尺寸（极尖宽度）直接决定磁头在磁盘上 的写磁轨宽度，这是影响电脑硬盘记录密度的一个