实现非接触式方式难以达到的高精度计测.pdf

()1316 / ZX-T φ6mm 479 φ6 1mm 0.1μm ZX-TDS01 φ6 4mm 0.1μm ZX-TDS04 φ6 4mm 0.1μm ZX-TDS04-L ZX-TDA 1 NPN ZX-TDA11 DC PNP ZX-TDA41 442 ZS-HL/ ZX ZS-L ZX-XBT1 442 ZX-L-N ZX-E 442 ZX-XBT2 DIN ZX-T ZX-SAM /-SB 472 ZX-T / / ZX-TDS01 ZX-TDS04 ZX-TDS04-L 1mm 4mm 1.5mm 5mm 1 0.1μm 2 0.1%F.S. 3 0.7N 0.25N IEC60529IP67 IEC60529IP54