器件和工艺数值模拟定义器件结构-PPT资料33页.ppt

定义器件结构;REGION The REGION statement defines the location of materials in a rectangular mesh.;Semiconductor Materials SILICON 硅 GAAS 砷化镓 POLYSILI 多晶硅 GERMANIU 锗 SIC 碳化硅 SEMICOND 半导体 SIGE 锗硅 ALGAAS 铝镓砷 A-SILICO α－多晶硅 DIAMOND 金刚石;Insulator Materials OXIDE NITRIDE SAPPHIRE OXYNITRI INSULATO ;Location Case1: X.MIN=n X.MAX=n Y.MIN=n Y.MAX=n IX.MIN=n IX.MAX=n IY.MIN=n IY.MAX=n Case 2: ROTATE R.INNER=n R.OUTER=n X.CENTER=n Y.CENTER=n Case 3: POLYGON X.POLY=a Y.POLY=a ;The following REGION s