微纳米技术常用于微纳系统材料04上课.pptVIP

常用于微、纳系统中的基础材料与工艺(二);Outline;聚合物MEMS ( Polymer MEMS ）;用于MEMS和微系统的聚合物;Polymer MEMS Devices;Major motivations for incorporating polymers into MEMS ;Electronics and optoelectronics are migrating strongly towards polymer, including displays, photo voltaic devices,memory,and transistors The silicon micromachining toolbox is relatively limited. Polymer MEMS increases the portfolio of microfabrication process drastically by allowing novel fabrication processes： casting and molding, low temperature chemical vapor deposition, embossing, spraying, screen printing, thick film processing, and stereo