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LDMOS – Technology and Applications
Shekar Mallikarjunaswamy
Shekar M Alpha Omega Semiconductor Inc. 1
Technology. Innovation. Powering the Future.
Outline
? Power Management Market Drivers
? LDMOS Technology Innovations
? Structure, FOMs; Planar, Trench, RESURF
? TCAD Simulations; Device Layouts; SPICE Models
? Process Integration – CMOS/BCD Platforms
? Reliability Improvements – HCI and ESD
? Applications – DC-DC, LED, Hot-swap, Battery
Protection
? Summary and Future Trends
Shekar M Alpha Omega Semiconductor Inc. 2
Power Management Market Growth
Key Drivers
$30B
$25B
$20B
$15B
$10B
$5B
Enabling Efficient Conversion, Regulation and Utilization of Power
$0B
2007 2008 2009 2010 2011 2012 2013
Sources: IMS July 2010 Discrete Report (Standard MOSFETs, IGBTs, IGBT Modules), IMS 2007 Power IC Report April 2009 update
Power Integrated Circuit - TAM
Power IC TAM - Consumer ($M)
Power IC TAM ($M)
$3,500M
$12,000M
$3,000M
$10,000M
$2,500M
$8,000M
$2,000M
$6,000M
$1,500M
$4,000M
$1,000M
$2,000M
$500M
$0M
$0M
2006 2007 2008 2009 2010 2011 2012 2013
2006 2007 2008 2009 2010 2011 2012 2013
Sum of TAM$ $8,068 $8,635 $8,874 $8,382 $9,181 $9,739 $10,245 $10,584
TAM$ $2,279 $2,455 $2,539 $2,404 $2,646 $2,763 $2,849 $2,893
Power IC TAM - Communications ($M)
Power IC TAM - Computing ($M)
$1,800M
$1,600M
$1,400M
$1,200M
$1,000M
$800M
$600M
$400M
$200M
$0M
2006 2007 2008 2009 2010 2011 2012 2013
$5,000M
$4,500M
$4,000M
$3,500M
$3,000M
$2,500M
$2,000M
$1,500M
$1,000M
$500M
$0M
2006 2007 2008 2009 2010 2011 2012 2013
TAM$ $1,416 $1,501 $1,507 $1,455 $1,488 $1,573 $1,668 $1,705
TAM$ $2,897 $3,165 $3,278 $3,104 $3,529 $3,825 $4,089 $4,334
Shekar M Alpha Omega Semiconductor Inc. 4
Outline
? Power Management Market Drivers
? LDMOS Technology Innovations
? Structure, FOMs; Planar, Trench, RESURF
? TCAD Simulations; Device Layouts; SPICE Models
? Process Integration – CMOS/BCD Platforms
? Reliability Improvements – HCI and ESD
? Applications – DC-DC, LED, Hot-swap, Battery
Protection
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