易普森真空炉故障报警信息及处理.docxVIP

1 2 3 4 5 6  报警信息说明 Roughing Pump Check the Roughing Pump Starter and The output to start the roughing pump was Fail the Roughing Pump Auxillary Contact energized, but the auxiliary contact from the motor starter failed to energize. 粗 泵故障 ( 机 械 检查粗泵起动器和辅助触头 启动粗泵的输出接通，但是电机起动器 泵故障 ) 的辅助触头没有接通。 Vacuum Booster Check the Vacuum Booster Starter and The output to start the vacuum booster was Fail the Vacuum Booster Auxiliary Contact energized, but the auxiliary contact from the motor starter failed to energize. 真 空增压 泵故 障 检查真空增压泵起动器和辅助触头。 启动真空增压泵的输出接通，但是电机 （罗茨泵故障） 起动器的辅助触头没有接通。 Chamber Check the