中科院 微电速子机械系统设计(mems)课件.pptVIP

中科院 微电子机械系统设计(MEMS)课件;Course Overview;Part 1;What are the Goals of this Course?;Course Mechanics;Lecture Outline;Micro ElectroMechanical Systems ;What is MEMS;Examples of MEMS Devices ;Dimensional Ranges;Batch Fabrication Technology; Moore’s Law;Moore’s Law;Other Batch Fabrication Processes;A Brief History of MEMS:1. Feynmann’s Vision;2. Planar IC Technology;Planar IC Technology;Planar IC Technology;Planar IC Technology;Why Didn’t MEMS Take Off in 1965?;More Recent History;More Recent History;Polysilicon Microstructures;Polysilicon MEMS + NMOS Integration;Polysilicon Electrostatic Micromotor