加速度传感器kxsd9芯片手册 pdf.docxVIP

2g Tri-axis Digital Accelerometer Specifications  PART NUMBER: KXSD9-2050 Rev. 3 Jul-2010 Product Description The KXSD9 is a tri-axis silicon micromachined accelerometer with a user selectable full- scale output range of ±2g, ±4g, ±6g or ±8g. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and enviro