加速度传感器kxsd9芯片手册 pdf.docxVIP

2g Tri-axis Digital Accelerometer Specifications  PART NUMBER: KXSD9-2050 Rev. 3 Jul-2010 Product Description The KXSD9 is a tri-axis silicon micromachined accelerometer with a user selectable full- scale output range of ±2g, ±4g, ±6g or ±8g. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning, self-test, and temperature compensation. The accelerometer is delivered in a 3 x 3 x 0.9 mm LGA plastic package operating from a 1.8 – 3.6V DC supply. Either I2C or SPI interfaces can be used to communicate to the chip to trigger A/D conversions or manage power consumption. Functional Diagram X Sensor Y Charge LPF Sensor Amp Z Temp Sensor Sensor Vdd 5 A/D SPI/I 2C IO Vdd 1 Motion Detection 3 AUX IN GND 4 6 8 9 10 7 36 Thornwood Dr. – Ithaca, NY 14850 ? 2009 Kionix – All Rights Reserved tel: 607-257-1080 – fax:607-257-1146 310-1547-1007221647 - info@ Page 1 of 25 2g Tri-axis Digital Accelerometer Specifications  PART NUMBER: KXSD9-2050 Rev. 3 Jul-2010 Product Specifications Table 1. Mechanical (specifications are for operation at 3.3V and T = 25C unless stated otherwise) Parameters Units Min Typical Max Operating Temperature Range oC -40 - 85 Zero-g Offset counts 1843 2048 2253 Zero-g Offset Variation from RT over Temp. mg/oC 0.5 (xy) 3 (z) FS1=1, FS0=1 (± 2g) 794 819 844 Sensitivity1 FS1=1, FS0=0 (± 4g) counts/g 390 410 430 FS1=0, FS0=1 (± 6g) 257 273 289 FS1=0, FS0=0 (± 8g) 189 205 221 Sensitivity Variation from RT over Temp. %/oC 0.01 (xy) 0.