激光原理及应用参考资料采用BCB平整技术的高速850nm垂直面发射激光器英文何晓颖.pdfVIP

11 2 中国光学 第 卷 第 期 Vol． 11 No． 2 2018 4 Apr． 2018 年 月 Chinese Optics 文章编号 2095-1531 (2018)02-0190-08 High - speed 850 nm vertical - cavity surface -emitting lasers with BCB planarization technique 1 2 2 2 2 HE Xiao-ying ，DONG Jian ，HU Shuai ，HE Yan ，LV Ben-shun ， 2 2 1 1* LUAN Xin-xin ，LI Chong ，HU Zong-hai ，GUO Xia (1． School of Electronic Engineering ，State Key Laboratory of Information Photonics and Optical Communications ，Beijing University of Posts and Telecommunications ，Beijing 100876，China ; 2． School of Information ，Beijing University of Technology ，Beijing 100124，China) * Corresponding author ，E-mail :guox @ bupt． edu． cn Abstract :Vertical-cavity surface-emitting lasers (VCSELs)are widely used in short-reached optical intercon- nects and data communication links because of their low energy consumption and high modulation speed． Ca- pacitance ，as the parasitic parameters ，affects the modulation bandwidth． In this paper ，parasitic capacitance of VCSELs is reduced by using a low-k benzocyclobutene (BCB)planarization technique． The detail BCB pla- narization technique has been discussed with optimal process parameters ，which is useful for high-speed VC- SEL fabrication． The small signal modulation bandwidth of the low-k BCB planarization VCSEL with 7 μm ox- ide aperture has been achieved to 15. 2 GHz． Key words :vertical-cavity surface-emitting laser ;high-speed modulation ;benzocyclobu