改善cvd金刚石涂层刀具的制备新工艺.docVIP

改善CVD金刚石涂层刀具的制备新工艺 本文通过对CVD沉积工艺的研究，分析了不同工艺条件对金刚石薄膜性能的影响，探讨了在WC-Co硬质合金基体上沉积高附着强度、低粗糙度金刚石薄膜的新工艺，对于改善金刚石薄膜涂层刀具性能具有很重要的意义。 The article analyzes the influence of different technology conditions on the diamond thin films performance, and discusses the new technologies of intermittent deposition with the low surface roughness and high adhesion strength on the WC-Co cemented carbides substrates through series experiment research, which is of great significance for practical application of improving mechanical properties of HFCVD diamond-coated thin film tools. 金刚石因具有极高的硬度、高导热性、低摩擦系数和低热膨胀系数等优异性能已成为理想的刀