低挥发性液体前体的饱和剂设计比较 Comparison of saturator designs for low volatility liquid precursor delivery.docxVIP

Comparison of saturator designs for delivery of low-volatility liquid precursors James E. Maslar,*,1 William A. Kimes,1 Vladimir B. Khromchenko,1 Brent A. Sperling,2 and Ravindra K. Kanjolia3 1National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899 2EMD Electronics,