半导体激光器电吸收调制器和双波导模斑转换器的单片集成_英文_.docVIP

半导体激光器电吸收调制器和双波导模斑转换器的单片集成_英文_ 第 26 卷 第 6 期Vol . 26 No . 6 半 导体学 报 C H IN ESE J O U RNAL O F SEM ICONDU C TO RS 2005 年 6 月 J une ,2005 Monol ithically Integrated La ser Diode and Electroa bsorption Modulator 3with Dual2Waveguide Spot2Size Converter Output Ho u Li nap nig , Wang Wei , Feng Wen n, g lZiahnu g Ho, Zu hFoan , Wa ng L uf eng , and Bi ia nng J ( N at i onal Resea rc h Cente r f or O p t oelect ronic T ec hnol o g y , I nst i t ute o f S e m icon d uct ors , )Chi nese A ca dem y o f S ciences , B ei j i n g 100083 , Chi na μAbstract : A 11 60m la ser dio de and elect roa bso rp tio n mo dulato r mo nolit hically integrated wit h a no vel dual2 waveguide spo t2size co nverter o utp ut fo r lo w2lo ss co upling to a cleaved single2mo de op tical fiber a re demo nst rated. The device s emit in a single t ra nsver se and qua si single lo ngit udinal mo de wit h a n SM SR of 251 6dB . These device s exhi bit a 3dB mo dulatio n ba ndwidt h of 151 0 GHz , and mo dulato r DC extinctio n ratio s of 161 2dB . The o utp ut bea m diver gence angles of t he spo t2size co nverter in t he ho rizo ntal a nd vertical directio ns a re a s small a s 71 3?×181 0?, re2 sp ectivel y ,re sulti ng in a 31 0dB co upling lo ss wit h a cleaved single2mo de op tical fiber . Key words : la ser dio de ; elect roa bso rp tio n mo dulato r ; spo t2size co nverter ; integrated op toelect ro nics ; op tical co u2 pling EEACC : 4320J () CLC number : TN2481 4 Document code : A Article ID : 025324177 20050621094206 me nt tolera nce s , a nd si mp le p acka gi ng sc he me s [ 4 ] wit ho ut u si ng a micro2le n s o r t ap ered fi ber . 1 Introduct ion (Mo nolit hic i nt e gratio n of a la se r dio de o r se mico n2 In rece nt yea r s , a n elect ro a b so rp tio n mo dula2 ) ducto r op tical a mp lifiera nd t he EA M wit h a SSC ( ) ( ) to r EA Mw hic h op erat e s u si ng t he qua nt um2co n2 o utp ut L D2EA M2SSC i s much mo re at t ractive ( ) fo r a t ra n smit t e r mo dule i