使用光刻法在金刚石台面制备金属薄膜电极.docxVIP

使用光刻法在金刚石台面制备金属薄膜电极 Chapter 1: Introduction-Background information on microfabrication and electrode fabrication-Importance and applications of metal thin film electrodes-Overview of photolithography and its advantages in electrode fabrication-Research objective and significance of the studyChapter 2: Materials and Methods-Description of materials used in the study, including diamond substrates and metal precursors-Details and steps involved in the photolithography process, such as surface cleaning, resist coating, exposure, development, and metal deposition-Characterization technique