大气压等离子体：流体模型和并行计算.pdfVIP

2962 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 41, NO. 10, OCTOBER 2013 Plasma at Atmospheric Pressure: Fluidic Modeling and Parallel Computing Svyatoslav Chugunov and Iskander Akhatov Abstract — Plasma-assisted processing and deposition of mate- The problems associated with the CVD systems are over- rials is an important component of modern industrial applica- come by the implementat