WATTrainingPPT学习教案完整版.pptxVIP

会计学1WATTraining OutlineWhat is WATTest PatternHardware SystemSoftware SystemTest Parameter第1页/共75页 WAT standard for Wafer Acceptance TestWhat is WAT?第2页/共75页 What kind of work?An electrical test system, non-productivity activityWAT is an electrical test system for process goodness monitor.Device characteristics: resistor, capacitor, interconnection, continuity, spacing, insulation, leakageWAT is the primary quality element for a foundry FAB ( the quality assurance for wafer output) WAT characteristics: DC force and measurement, Automation, high throughput, precision, samplingWhat is WAT?第3页/共75页 Why WATMonitor Process Window.Check Design Rule.Control the Process Parameters(SPC).Debug the Process Error.Reliability Characterization.Device Modeling for Circuit Design.Develop next Generation.What is WAT?第4页/共75页 Test PatternTest key: WAT just tests the Test Key some was put inside chip, for design rule check, yield monitor and process qualification and development. some was put on scribe line. These test key will be destroyed after die saw. TL0018AU…….....12322第5页/共75页 Test Key ATest Key BTest Key DTest Key CTest Key ETest Key FSite Test KeyTest Pattern第6页/共75页 TESTER 1Test HeadProberWaferProbe cardChuckController1System sketch map Hardware System第7页/共75页 WAT (Wafer Acceptance Test): electrical parameter test on specially designed test structure on scrub lanes, such as all kinds of transistors, resist test patterns, leakage/breakdown test patterns, to decide whether the wafer go through an normal process, and shippable to customer.Test Tools: TEL P8XL Prober station Keithley S630 Auto-tester (all SMU: Current accuracy: 0.1fA) Signatone S1170 Manual Prober Keithley S4200 Manual tester (One SMU: Current accuracy: 0.1fA) Agilent 4284 C-V tester (Manual) Agilent 4156 Manual tester (all SMU: Current accuracy: 10fA) Hardware System第8页/共75页 Agilent Testing system Automatic Tester4072A (Agilent)Automatic ProberP8-XL (TEL)Server (workstation)HPProber Card Ha