文稿报告tehyingkhai 2组文案.pdfVIP

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  • 约8.84万字
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  • 2024-01-04 发布于北京
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AthermalcompliantMEMSheatuatorwasdesignedandfabricatedinthisproject.Thedesign

strategieswerediscussedandtheCoventorsimulationresultwaspresented.Thedevice

fabricationprocedurewasdescribedwiththerunsheetludedintheappendix.The

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