ASTM F798-97 美国材料与试验协会标准.pdfVIP

Designation:F798–97(Reapproved2002)

StandardPracticefor

DeterminingGetteringRate,SorptionCapacity,andGas

ContentofNonevaporableGettersintheMolecularFlow

Region1

ThisstandardisissuedunderthefixeddesignationF798;thenumberimmediatelyfollowingthedesignationindicatestheyearof

originaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.A

superscriptepsilon()indicatesaneditorialchangesincethelastrevisionorreapproval.

1.ScopeRecommendedPractice2.3ProcedureforCalibratingGas

1.1Thispracticedescribestechniquesfordeterminingget-AnalyzersoftheMassSpectrometerType4

teringrates,sorptioncapacity,andgascontentofnonevapo-RecommendedPractices6.2,6.4,and6.5Proceduresfor

rablegettersinthemolecularflowregion.CalibratingPressureGagesandTheirControls4

1.2Proceduresforactivatinggettersandfordetermining

3.Terminology

gasevolutionratesarealsogiven.

1.3Thevarioustestsdescribedaremostlydestructivein3.1DefinitionsofTermsSpecifictoThisStandard:

nature.Ingeneral,thetestsaresemiquantitative,buttheycan3.1.1nonevaporablegetters—materialsnotrequiring

beexpectedtoyieldcomparativeinformationonasingleevaporation,thatareusedtoremovegasespresentafterdevice

laboratorybasis.Multilaboratoryreproducibilitycanbe