二次配cost-down(最新整理版).xlsVIP

PPDrain

exhaust

chemical

SS304Drain

UPW

HiVacExh

Foreline

CityWater

PV

PCW-PVC

Pre-lim

Breakdown-RMB

点数统计

系统总价

ToolList

data

Qty

AWD

CMP

ATBD01

RMBPORTION

USDPORTION

Package

Units

UnitRate

TotalPrice

WorkPackageBreakdown

Lot

SUB-TOTALS-PACKAGES;

Totals(RMB)

Area

NewEqID

OldEqID

Phase

Function

Vendor

Model

Qty

ACST01

ML

STI/ILD

ACOX01

7K

ILDPSG

ACWP01

ML

W-CMP

ACCU01

ML

Cu-CMP

ATHD01

ML

HDPSTI

ATAR01

ML

DARC/HardMask(BEOL)

ATAR51

ML

DARC/HardMask(FEOL)

ATSN01

ML

PassivationSiON/SiN

ATTS01

ML

PETEOS

ATPF01

MLI

FTEOS

MLI

BD

LAM

FSI

subtotal

DESIGNCONSTRUCTIONMANAGEMENT;

Prelimineries

Testingandcommissioning

SUB-TOTAL;

Tax

GrandTotal

UNITCOSTPERHOOK-UPPOINT(RMB)

Engineering

Excluded

5848sLocation

SUSS

MA6

DoublesideAligner

POWER

PN2

GN2

PO2

PH2

HE

CDA

PV

HV

CW

UPW

PCW

GEX

SOX

SCX

AMX

SF6

C4F8

HF

HF

AR

N2H2

CF4

CHF3

BCL3

CH4

15A

6mm

MDA

H2SO4

H2O2

HCl

NH4OH

CHF

Drain

DHF

AMF

SOLVNT

CDS

Exhaustreq.:Toxic/pyrophoric

Forprocesschamber

Exhaustreq.:Toxic/pyrophoric

ForGDU

Exhaustreq.:Toxic/pyrophoricForchamberservice

Exhaustreq.:Toxic/pyrophoricForchamberservice

5PE26/25Location

fxp(4CH)

Aviza

DRIEetch

1/4

1/2

Par

10mm

ISO65

1-1/2

12mm

specialtygas

100mm

150mm

TBM(Top-to-BottomMeasure)

DSM8(Manual)

nearby5LithoDoor

42KVA

HFvapour

7MF02

40A

DoublesideAligner

Proximitymaskaligner

Bondalignment

Anodicbonding

ResistCoat/Developer

BakeOven

AirAnnealFurance

MetalSputter

BHF-SC1WetEtch,spray

BHFetch

SolvenWetResistStrip+Dryer

Wetaluminumetch(PWS)/WetTietch

(H2O2+EDTA)+Dryer

MEMSroom

SUSS

Canon1X

TEL

AM

MPA600FA

BA6

SB6E

Mark8

Endura

Mercury

50A

24A

8mm

70A

10

350A

4*7

120KW

1

16A

3/4

4

3/8

2

7*7

FrontSideGrinding

Waferbowmeasurement

Microscope

DryPRStripping

DefectReviewmeasurement

PECVDOxideEtch

喷胶机

Wetsilicaonetch(KOH)

platingtank

Mountwaferontape

Dicingsaw

EdgeGrind