制冷机低温泵冷板阵列仿真分析及结构优化.pdfVIP

第45卷

第7期真空科学与技术学报

2025

年

7

月CHINESE

JOURNAL

OF

VACUUM

SCIENCE

AND

TECHNOLOGY523

制冷机低温泵冷板阵列仿真分析及结构优化

11*12

姚吉恺王国栋李恒霖陈肇玺

(1.

合肥工业大学

机械工程学院

合肥

230009；2.

中国科学院合肥物质科学研究院

等离子体物理研究所

合肥

230031)

SimulationAnalysisandStructuralOptimizationofColdPanelArrayin

Cryocooler-BasedCryopump

11*12

YAO

Jikai，WANG

Guodong，LI

Henglin，CHEN

Zhaoxi

(1.

SchoolofMechanicalEngineering,HefeiUniversityofTechnology,Hefei230009,China;

2.

Instituteof

PlasmaPhysics,HefeiInstituteofPhysicalScience,CAS,Hefei230031,China)

AbstractDue

to

stable

operation

and

high

pumping

speed,

cryopumps

are

widely

used

in

semiconductor

manufacturing,

scientific

apparatus

and

space

environment

simulators.

The

cold

plate

array

of

a

cryopump,

as

the

main

component

for

pumping

hydrogen,

significantly

influences

its

pumping

performance.

This

study

focuses

on

a

G-M

cryocooler-based

cryopump,

based

on

rarefied

gas

dynamics

to

comparatively

analyze

the

impact

of

different

numbers

of

cold

plate

layers

and

diameters

on

pumping

performance

by

angular

coefficient

method.

The

ideal

cold

plate

array

structure

is

selected

based

on

three

indexes:

pumping

speed,

cooling

down

time

and

operational

lifespan.

Subsequently,

a

thermal-fluid

coupling

analysis

is

conducted

on

the

cryopump

using

the

ideal

cold

plate

array,

comparing

the

effects

of

different

installation

heights

of

the

second-stage

cold

head

in

the

G-M

cryocoole