光刻工艺与设备Spin_coating Technical University of Denmark.pdfVIP

LithographyToolPackage

2.SpinCoating

LeifSteenJohansenandThomasAnhøj

Outline

1.Introduction4.Development

–ProcessstepsinUV–Principle

lithography–Effects

2.Spincoating–Resisttone,photo-

–Resistcompositionchemistry,and

contrast

–Pre-treatment

–Principle5.Post-processing

–Softbakeand

–Spincurvecharacterization

3.Exposure–Postprocessi