T/CEMIA 043-2024集成电路扩散设备用石英外管.pdf

ICS81.040.30

CCSQ35

团体标准

T/CEMIA043—2024

集成电路扩散设备用石英外管

Quartzoutertubesforintegratedcircuitdiffusionequipment

2024⁃11⁃05发布2025⁃01⁃05实施

中国电子材料行业协会发布

中国标准出版社出版

T/CEMIA043—2024

目次

前言··························································································································Ⅲ

1范围·······················································································································1

2规范性引用文件········································································································1

3术语和定义··············································································································1

4分类和标记··············································································································1

5材料·······················································································································1

6技术要求·················································································································2

7试验方法·················································································································5

8检验规则·················································································································9

9产品标识、包装、运输和贮存·························································································9

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