微电子技术论文1-s2.0-S0924424716305040-main.pdfVIP

SensorsandActuatorsA250(2016)129–137

ContentslistsavailableatScienceDirect

SensorsandActuatorsA:Physical

journalhomepage:www.elsev/locate/sna

Designandcharacterizationofone-layerPVDFthinfilmfora3Dforce

sensor

YungTing∗,Suprapto,AdityaNugraha,C.-W.Chiu,HariyantoGunawan

DepartmentofMechanicalEngineering,ChungYuanChristianUniversity,No.200,ChungPeiRd.,ChungLi,32023,Taiwan

articleinfoabstract

Articlehistory:Inthisstudy,aPVDFthinfilmwithonelayerisdesignedfora3-axisforcesensor.Intheprocessof

Received10June2016stretching,appropriatestretchingratioandoventemperatureforheatingPVDFtomakefilmthinenough

Receivedinrevisedform29August2016andwithlargefractionofphaseisimperativetoensurethesubsequentpolingsuccessfully.Toachieve

Accepted19September2016thedesiredfunction,specialelectrodepatterndesignofpolarizationalongthethicknessandhorizontal-

Availableonline20September2016

sidedirectionisintroduced.Severalimportantcharacteristicsofpiezoelectricityareinvestigatedbyuse

ofFTIR,XRD,andPFM.Frequencyresponseandinput/outputsensitivityresponseaswellaspiezoelectric

Keywords:

coefficientd33oftheproposedPVDFsensoraremeasuredforperformanceevaluation.

PVDF