六方氮化硼薄膜制备及其深紫外光电探测器研究.docxVIP

六方氮化硼薄膜制备及其深紫外光电探测器研究

关键词：六方氮化硼；薄膜制备；深紫外光电探测器；CVD；PVD；MBE

Abstract:Thispaperaimstoexplorethepreparationmethodsofhexagonalboronnitride(h-BN)thinfilmsandtheirapplicationsasdeepultravioletphotodetectors.Thebasicpropertiesandstructuralcharacteristicsofh-BNarefirstintroduced,followedbyadetaileddiscussionofthethinfilmpreparationtechniques,includingchemicalvapordeposition(CVD),physicalvapordeposition(PVD),andmolecularbeamepitaxy(MBE).Thekeyparametersduringthepreparationprocess,suchastemperature,pressure,gasflowrate,andsubstrate