On-Chip Microcavities 技术手册说明书.pdf

PHYSICALREVIEWAPPLIED18,034035(2022)

High-SensitivityAir-CoupledMegahertz-FrequencyUltrasoundDetectionUsing

On-ChipMicrocavities

HaoYang,1,2Zhi-GangHu,1,2Yuec

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