原创力文档Optical and Quantum Electronics Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces说明书用户手册.pdf
OpticalandQuantumElectronics(2021)53:210
/10.1007/s11082-021-02846-7
Developmentof
opticalMEMS‑basedmicromirrorarrays
on
fexiblesubstratefor
curvilinearsurfaces
Muhammad
Rizwan
Amirzada1,2
·Qingdang
Li1,3
·Hartmut
Hillmer1
Received:16March2020/Accepted:27M
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