GBT 26307-2025 银靶材标准立项发展报告.docxVIP

银靶材国家标准立项发展报告

StandardizationDevelopmentReport:SilverTargetMaterials

摘要

关键词：银靶材；溅射靶材；物理气相沉积；标准化；产品规范；高纯材料

Abstract

Silvertargetmaterials,ascriticalfunctionalmaterialsinphysicalvapordeposition(PVD)technology,arewidelyappliedinhigh-endmanufacturingfieldssuchassemiconductorintegratedcircuits,flatpaneldisplays,photovoltaiccells,magneticrecordingmedia,andlow-emissivitycoatedglass.Thequalityofsilvertargetsdirectlyaffectstheperformanceandreliabilityofthin-filmdevices.WiththerapiddevelopmentofChinaselectronicinformationindustryandthec