nist-基于宽频介电谱的集成系统材料演变与可靠性研究 Broadband Dielectric Spectroscopic (BDS) Studies of Material Evolution and Reliability in Integrated Systems.docxVIP

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nist-基于宽频介电谱的集成系统材料演变与可靠性研究 Broadband Dielectric Spectroscopic (BDS) Studies of Material Evolution and Reliability in Integrated Systems.docx

BroadbandDielectricSpectroscopyforReliabilityAssessmentinIntegratedElectronicDevices*

ChristopherE.Sunday,YawS.Obeng

PhysicalMeasurementLaboratory,

NationalInstituteofStandardsandTechnology

100BureauDrive,Gaithersburg,MD20899

*Certaincommercialequipment,instruments,ormaterialsareidentifiedinthisreporttospecifytheexperimentalprocedureadequately.SuchidentificationisnotintendedtoimplyrecommendationorendorsementbytheNationalInstituteofStandardsandTechnology,norisitintendedtoimplythatthematerialsorequipmentidentifiedarenece

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nist-基于宽频介电谱的集成系统材料演变与可靠性研究 Broadband Dielectric Spectroscopic (BDS) Studies of Material Evolution and Reliability in Integrated Systems.docxVIP