(共58页PPT)英寸晶圆55nm工艺后段介绍.pptx

(共58页PPT)英寸晶圆55nm工艺后段介绍.pptx

Huali55nmLP

BEOLflowintroduction

2OutlineOverviewHL55/65nmBEOLIntegrationSchemesHL55LPBEOLProcessFlowIntroductionM1(SingleDamascene,MHMProcess)Mx/Vx-1(1X,DualDamascene,PartialtrenchfirstMHMprocess)T4Vx/T4Mx(4X,DualDamascene,FullviafirstBARCetchbackprocess)RV/APL/

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