毕业设计（论文）-柔性铰链微动工作台的测量与控制.doc

摘 要 柔性铰链以其无摩擦、无间隙、运动灵活、敏度高的优点，在各个领域得到广泛应用，尤其在纳米技术领域中有着广泛的应用前景，柔性铰链是实现纳米级微运动的关键技术，其运动位移的测量与控制是实现纳米运动的核心技术。因而在本次毕业设计中采用柔性铰链机构，电容式传感器以及压电陶瓷驱动相结合，设计了一套微动工作台的测量与控制系统。用我们所学知识，使之成为一套精密测量与控制系统，实现高效率，高精度，高稳定性，低误差的测量与控制系统。在本次毕业设计中通过解析法从理论上分析了柔性铰链微动工作台的工作原理，描述了电容式传感测微原理，并设计了电容信号处理电路、PID运算电路、功率放大电路，以及相应的单片机接口电路与软件。在该测量与控制系统中，由柔性铰链构成的平行四杆机构产生一个微位移量δ，由于被测位移量为纳米级，从而采用电容式传感器进行测量，再将测量通过电容信号处理电路进行处理。然后以单片机为核心通过软件编程对信号进行采样、分析、运算，并用4位数码显示管对测量值进行显示，再用键盘输入预定值。为了更好地减小误差，提高系统的控制精度，运用PID运算电路结合压电陶瓷驱动来实现对该工作台的纳米级控制。最终使该柔性铰链微动工作台实现运动范围10，分辨率1nm。 关键词：柔性铰链；电容式传感器；传感器处理电路；MCS-51单片机;；压电陶瓷 Abstract Flexible hinge with its no friction, no clearance, sports flexible, the advantage of high sensitivity, widely used in various fields, especially in the field of nanometer technology has a wide application prospect, flexible hinge nanoscale micro motion is to realize the key technology, their sports displacement measurement and control is to realize the core technology of the nanometer movement. Thus in the graduation design using the flexible hinge institutions, capacitive sensor and piezoelectric driven unifies, designed a set of budge the measurement and control system worktable. With our knowledge learnt, make it become a set of precision measurement and control system, realize high efficiency, high precision, high stability, low error of measurement and control. In the graduation design through analytical method of flexible hinge theoretically analyses the working principle of workbench budge, describes the capacitive sensing micro-distance measuring principle, and designed a capacitor and corresponding signal processing circuit, the SCM processing circuit and software. In the measurement and control system, composed of by flexible hinge parallel four-bar produce a micro displacement of the delta, for being measured displacement, thus using nanoscale capacitive sensor measuring, again will measure through the capacitance signal processing circuit for processing. Then based on singlechip through so